Abstract

In the current evolving arena of science and engineering, slowly the nanotechnology is becoming part and parcel of manufacturing, analysis, testing and verification domains. This has lead to the emphasis on the design and development of systems which have nanometer precision positioning capability with a comparatively long travel range in the order of several centimeters. For such systems, selection of actuators plays a vital role. This paper surveys the various actuators that are commercially available for use in micro/Nano positioning systems.